| Description |
Standard / Value |
SciMax 40 |
SciMax 30 |
SciMax 25 |
SciMax 20 |
SciMax 15 |
SciMax 10 |
SciMax 5 |
| Material Composition |
ASTM A269, A632 |
√ |
√ |
√ |
√
|
√
|
√
|
√ |
| Mechanical Tests |
ASTM A269, A632 |
√ |
√ |
√ |
√ |
√ |
√ |
√ |
| Visual Inspection 100% |
Internal procedure |
√
|
√
|
√
|
√
|
√
|
√
|
√
|
| Dimensional Measurements |
ANSI B31.3 |
√
|
√
|
√
|
√
|
√
|
√
|
√
|
| Hydrocarbon Cleaning Inspection |
CGA G-4.1 |
√
|
√
|
√
|
√
|
√
|
√
|
√
|
| Helium Leak Test for Welded Fittings |
1*10^-9 scc/sec |
√
|
√
|
√
|
√
|
√
|
√
|
√
|
| Inspection Certification |
EN 10204 3.1 |
√
|
√
|
√
|
√
|
√
|
√
|
√
|
| Ra Measurements |
ASME B46.1 |
|
√
|
√
|
√
|
√
|
√
|
√
|
| Particles Test |
<10 particles (greater than 0.1µ ft^3) |
|
|
|
|
|
√
|
√
|
Moisture Test for Tube: Additional Moisture on
UHP N2 Purged Gas |
Δ0.5 ppm |
|
|
|
|
|
√
|
√
|
| Ultra Pure Water Resistivity |
18 MΩ |
|
|
|
|
|
√
|
√
|
| SEM TEST - Scanning Electron Microscopy for Defects |
SEMATECH 90120401B
40 defects (magnification*3500) |
|
|
|
|
|
√
|
√
|
XPS TEST - X Ray Photoelectron Spectroscopy
for Analysis of Cr/Fe |
SEMATECH 90120403B 1.5/1< |
|
|
|
|
|
√
|
√
|
XPS TEST - X Ray Photoelectron Spectroscopy
for Analysis of CrO/FeO |
SEMATECH 90120403B 3/1 < |
|
|
|
|
|
√
|
√
|
AES TEST - Auger Electron Spectroscopy
for Measuring of Oxide Thickness |
SEMATECH 91060573B / 20 A< |
|
|
|
|
|
√
|
√
|